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Updated: Mar 11, 2026

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor
Published on: August 30, 2012
10 nm deep, sub-nanoliter fluidic nanochannels on germanium for attenuated total reflection infrared (ATR-IR)
K K Sriram1, Simantini Nayak2, Stefanie Pengel2
1Institute of Physics, Academia Sinica, Taiwan. cfchou@phys.sinica.edu.tw.
Abstract:
The fabrication of sub-nanoliter fluidic channels is demonstrated, with merely 10 nm depth on germanium, using conventional semiconductor device fabrication methods and a polymer assisted room-temperature sealing method. As a first application, an ultralow volume (650 pL) was studied by ATR-IR spectroscopy. A detection limit of ∼7.9 × 1010 molecules of human serum albumin (HSA) (∼0.2 mM) in D2O was achieved with highly specific ATR-IR spectroscopy.
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