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Related Concept Videos

Atomic Emission Spectroscopy: Instrumentation01:22

Atomic Emission Spectroscopy: Instrumentation

1.5K
The instrumentation of atomic emission spectrometry (AES) involves various components, including atomization devices that convert samples into gas-phase atoms and ions. There are two main types of atomization devices: continuous and discrete atomizers.  Continuous atomizers, like plasmas and flames, introduce samples in a constant stream, while discrete atomizers inject individual samples using syringes or autosamplers. The most common discrete atomizer is the electrothermal atomizer.
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Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation01:26

Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation

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Inductively coupled plasma (ICP) is the common plasma source used in atomic emission spectroscopy (AES), a technique that detects and analyzes various elements in a sample. This method is often called inductively coupled plasma atomic emission spectroscopy (ICP-AES).
There are three main types of inductively coupled plasma atomic emission spectroscopy  (ICP-AES) instruments: sequential, simultaneous multichannel, and Fourier transform instruments, with the latter being less commonly used....
903
Atomic Emission Spectroscopy: Overview01:20

Atomic Emission Spectroscopy: Overview

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Atomic emission spectroscopy (AES) is an analytical technique used to determine the elemental composition of a sample by analyzing the light emitted from excited atoms. In AES, atoms in a sample are excited to higher energy levels by thermal energy from high-temperature sources, such as plasma, arcs, or sparks. When these excited atoms return to lower energy states, they emit light at specific wavelengths characteristic of each element. The resulting atomic emission spectrum, which consists of...
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Atomic Emission Spectroscopy: Lab01:29

Atomic Emission Spectroscopy: Lab

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AES is a powerful analytical technique, especially effective when used with plasma sources, producing abundant spectra in characteristic emission lines. The Inductively Coupled Plasma (ICP), in particular, yields superior quantitative analytical data due to its high stability, low noise, low background, and minimal interferences under optimal experimental conditions. However, newer air-operated microwave sources are emerging as promising alternatives that could be more cost-effective than...
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Related Experiment Video

Updated: Mar 11, 2026

Experimental Methods for Spin- and Angle-Resolved Photoemission Spectroscopy Combined with Polarization-Variable Laser
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EUV scatterometer with a high-harmonic-generation EUV source.

Yi-Sha Ku, Chia-Liang Yeh, Yi-Chang Chen

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    |December 2, 2016
    PubMed
    Summary
    This summary is machine-generated.

    We developed an extreme ultraviolet (EUV) scatterometer using diffracted coherent light to analyze nanoscale structures. This new tool accurately determines material properties from diffraction patterns, enabling high-resolution spatial measurements.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Nanotechnology

    Background:

    • Characterizing nanoscale periodic structures requires advanced metrology.
    • Extreme ultraviolet (EUV) light offers high resolution due to its short wavelength.
    • Coherent diffraction analysis is a powerful technique for structural determination.

    Purpose of the Study:

    • To develop and validate an extreme ultraviolet (EUV) scatterometer for nanoscale metrology.
    • To establish a methodology for determining structural and constitutive parameters of periodic nanostructures.
    • To demonstrate high-resolution spatial performance using coherent EUV light.

    Main Methods:

    • Utilizing coherent extreme ultraviolet (EUV) light diffracted from periodic nanoscale features.
    • Employing high harmonic generation synchronized with intense Ti:sapphire laser pulses.
    • Implementing an inverse-problem methodology and rigorous coupled-wave analysis (RCWA) for data analysis.
    • Developing a library-matching process for efficient parameter extraction.

    Main Results:

    • Successful development of a functional EUV scatterometer.
    • Demonstration of high-resolution spatial performance capabilities.
    • Preliminary measurement results confirming the scatterometer's effectiveness in characterizing nanostructures.
    • Validation of the RCWA algorithm for accurate and rapid parameter extraction.

    Conclusions:

    • The developed EUV scatterometer is a viable tool for nanoscale metrology.
    • The inverse-problem approach combined with RCWA provides accurate structural and constitutive parameter determination.
    • This technique enables precise characterization of periodic nanostructures using coherent EUV light.