A micro-scale plasma spectrometer for space and plasma edge applications (invited)

Area of Science:

• Physics
• Engineering
• Materials Science

Background:

• Plasma diagnostics require sophisticated instrumentation for accurate measurements.
• Existing plasma spectrometers can be bulky and expensive.
• Advances in microfabrication offer opportunities for miniaturization and cost reduction.

Purpose of the Study:

• To describe a novel plasma spectrometer design.
• To leverage lithography and microchip stacking for spectrometer fabrication.
• To evaluate the performance of key spectrometer components.

Main Methods:

• A plasma spectrometer was designed using lithography and microchip stacking.
• Curved plate energy analyzers and collimators were etched into a silicon wafer.
• Spectrometer elements were tested using a 5 keV electron beam.

Main Results:

• Collimator transmission measurements agreed with design targets.
• Energy selectivity measurements were in good agreement with design targets.
• The fabricated spectrometer elements showed promising performance.

Conclusions:

• The described plasma spectrometer design is feasible.
• The silicon wafer-based spectrometer elements are suitable for plasma diagnostics.
• A single wafer element can serve as a plasma processing or fusion first wall diagnostic.