Room-Temperature Atomic Layer Deposition of Al2 O3 : Impact on Efficiency, Stability and Surface Properties in

Malgorzata Kot1, Chittaranjan Das1, Zhiping Wang2

  • 1Applied Physics and Sensors, Brandenburg University of Technology Cottbus-Senftenberg, Konrad-Wachsmann-Allee 17, 03046, Cottbus, Germany.

Chemsuschem
|December 8, 2016
PubMed

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