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Updated: Mar 10, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Hao Wu1, Hua Wang2, Guanghai Li2
1Key Laboratory of Materials Physics, Anhui Key Laboratory of Nanomaterials and Nanotechnology, Institute of Solid State Physics, Chinese Academy of Sciences, Hefei 230031, P. R. China. ghli@issp.ac.cn.
Defect engineering transforms non-SERS active metal oxide semiconductors into highly sensitive SERS substrates. Introducing oxygen vacancies significantly enhances the SERS enhancement factor, enabling sensitive detection of various analytes.
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