Silicon-on-insulator-based complementary metal oxide semiconductor integrated optoelectronic platform for biomedical...

Area of Science:

• Biomedical Engineering
• Optoelectronics
• Microelectronics

Background:

• Microscale optical devices are crucial for localized biological manipulation, including neural recording and targeted cancer cell delivery.
• Current methods often require extreme optical focusing or nanoparticles, limiting in vivo applications.
• Wireless power harvesting and telemetry offer a promising alternative for untethered microsystem operation.

Purpose of the Study:

• To present design and integration techniques for optical power harvesting structures with complementary metal-oxide-semiconductor (CMOS) platforms.
• To enable complex in vivo applications like actuating single nerves without stringent focusing requirements.
• To leverage Silicon-on-Insulator (SOI) technology for miniaturized optoelectronic and microelectronic device fabrication on a single substrate.

Main Methods:

• Utilizing near-infrared biomedical optics for efficient optical power harvesting.
• Employing Silicon-on-Insulator (SOI) based platforms for integrated optoelectronic and microelectronic device fabrication.
• Integrating optical power harvesting structures with monolithically integrated electronics on CMOS platforms.

Main Results:

• Demonstrated effective optical power harvesting using near-infrared optics at submillimeter scales.
• Successfully integrated optical power harvesting with SOI-based CMOS platforms and microelectronics.
• Showcased the potential for creating miniaturized, untethered optoelectronic biomedical systems.

Conclusions:

• SOI platforms offer a robust architecture for developing advanced optoelectronic biomedical systems.
• Optical power harvesting integrated with CMOS technology enables sophisticated in vivo applications.
• These advancements pave the way for novel biomedical implants and lab-on-chip systems.