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Updated: Mar 9, 2026

Tools for Surface Treatment of Silicon Planar Intracortical Microelectrodes
Published on: June 8, 2022
Robust Functionalization of Large Microelectrode Arrays by Using Pulsed Potentiostatic Deposition
Joerg Rothe1, Olivier Frey2, Rajtarun Madangopal3,4
1ETH Zurich, Department of Biosystems Science and Engineering, Bio Engineering Laboratory, Mattenstrasse 26, CH-4058 Basel, Switzerland. joergenmarode@gmail.com.
A novel pulsed voltage electrodeposition method uniformly coats microelectrodes with various materials like platinum, gold, and polymers. This technique offers precise control for microsensor development and functionalization of large electrode arrays.
Area of Science:
- Materials Science
- Electrochemistry
- Nanotechnology
Background:
- Surface modification is crucial for microsensor and microsensor array development.
- Existing methods may lack uniformity, flexibility, or precise control over deposited coatings.
Purpose of the Study:
- To present a novel electrodeposition scheme using voltage pulses for microelectrode surface modification.
- To demonstrate the uniformity, flexibility, and precise control offered by this pulsed deposition method.
Main Methods:
- Utilized a pulsed potentiostatic deposition scheme.
- Employed a fully integrated complementary metal-oxide-semiconductor (CMOS) chip with a 1024-microelectrode array.
- Deposited and characterized platinum, gold, poly(ethylenedioxythiophene) (PEDOT), and poly(phenylenediamine) (PPD).
Main Results:
- Achieved uniform electrode coatings with precise control over surface texture.
- Demonstrated successful deposition of four distinct materials (Pt, Au, PEDOT, PPD).
- Showcased the method's applicability to individual electrodes and large arrays (up to thousands).
Conclusions:
- The pulsed voltage electrodeposition method is robust, reproducible, and versatile for microelectrode functionalization.
- This technique is highly suitable for developing advanced microsensors and integrated microelectrode arrays.
- The method allows for tailored surface properties critical for diverse sensor applications.
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