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Updated: Mar 9, 2026

Knowledge Based Cloud FE Simulation of Sheet Metal Forming Processes
Published on: December 13, 2016
A new method of probing mechanical losses of coatings at cryogenic temperatures
Serge Galliou1, Samuel Deléglise2, Maxim Goryachev3
1FEMTO-ST Institute, Univ. Bourgogne Franche-Conté, CNRS, ENSMM 25000 Besançon, France.
Abstract:
A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coating nowadays. The approach is demonstrated for chromium, chromium/gold, and multilayer tantala/silica coatings. The Ta2O5/SiO2 coating has been found to exhibit a loss angle lower than 1.6 × 10-5 near 30 MHz at 4 K. The results are compared to the previous measurements.
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