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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Corrosion Characteristics of Silicon Carbide and Silicon Nitride
1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.
Abstract:
The present work is a review of the substantial effort that has been made to measure and understand the effects of corrosion with respect to the properties, performance, and durability of various forms of silicon carbide and silicon nitride. The review encompasses corrosion in diverse environments, usually at temperatures of 1000 °C or higher. The environments include dry and moist oxygen, mixtures of hot gaseous vapors, molten salts, molten metals, and complex environments pertaining to coal ashes and slags.
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