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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Design and commissioning of an aberration-corrected ultrafast spin-polarized low energy electron microscope with

Weishi Wan1, Lei Yu2, Lin Zhu2

  • 1College of Materials Science and Engineering, Chongqing University, Chongqing 400044, PR China; Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.

Ultramicroscopy
|January 8, 2017
PubMed

Keywords:
Aberration correctionLEEMSPLEEMSTM

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