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Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light

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    |January 14, 2017
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    Summary

    A new instrument accurately measures stray light in planar diffraction gratings. This scatterometer achieves high resolution and a wide dynamic range, improving grating quality evaluation.

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    Area of Science:

    • Optics and Photonics
    • Optical Metrology

    Background:

    • Stray light significantly impacts the quality assessment of diffraction gratings.
    • Accurate measurement of stray light from planar diffraction gratings is crucial for grating development.

    Purpose of the Study:

    • To develop and validate a novel instrument for precise stray light measurement in planar diffraction gratings.
    • To achieve wideband, variable aperture, and high-resolution stray light measurements.

    Main Methods:

    • Designed a planar grating stray light testing instrument utilizing a Czerny-Turner (C-T) structure.
    • Developed an optical and mechanical model based on scalar diffraction and Fresnel-Kirchhoff diffraction theories.
    • Employed an attenuation method with neutral density filters for enhanced accuracy.

    Main Results:

    • Demonstrated a scatterometer dynamic range exceeding nine orders of magnitude.
    • Successfully measured the grating distribution function (GDF) and correlated data with power spectral density (PSD).
    • Achieved full aperture (15mm×15mm-200mm×200mm) and wideband (380-900 nm) measurements for various gratings.

    Conclusions:

    • The developed instrument enables accurate, wideband, and high-resolution stray light measurements for planar diffraction gratings.
    • The instrument's design ensures low intrinsic stray light, improving measurement reliability.
    • Experimental results confirm measurement accuracy down to 10⁻⁹.