Improved master-replica separation process for fabrication of a blazed concave grating by using a combination-type...

Area of Science:

• Optics and Photonics
• Materials Science and Engineering

Background:

• Traditional fabrication of blazed concave gratings can be complex and may lead to inconsistencies.
• Achieving high curvature and small radii in gratings presents significant manufacturing challenges.

Purpose of the Study:

• To present a novel imprinting process for fabricating blazed concave gratings.
• To demonstrate a method for creating gratings with small radius and large curvature.
• To improve the consistency and precision of grating fabrication.

Main Methods:

• Utilizes a combination-type convex grating as a master, replacing single-part masters in traditional methods.
• Employs a two-step fabrication technology where parts of the convex grating are independently separated from the resist layer.
• Ensures the concave blazed grating pattern in the resist closely matches the master grating pattern.

Main Results:

• Successfully demonstrated the feasibility of the two-step imprinting fabrication technology.
• The process allows for the fabrication of blazed concave gratings with small radii and large curvature.
• The use of a combined master enhances pattern consistency between the master and the fabricated grating.

Conclusions:

• The presented imprinting process offers a viable and effective method for fabricating advanced blazed concave gratings.
• This technique addresses limitations of traditional methods, enabling precise manufacturing of gratings with specific optical properties.
• The two-step fabrication approach ensures high fidelity in replicating the grating structure, crucial for optical applications.