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Atomic Force Microscopy

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

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Related Experiment Video

Updated: Mar 8, 2026

Measuring the Mechanical Properties of Living Cells Using Atomic Force Microscopy

Measuring the Mechanical Properties of Living Cells Using Atomic Force Microscopy

Published on: June 27, 2013

Multi-MHz micro-electro-mechanical sensors for atomic force microscopy.

Bernard Legrand¹, Jean-Paul Salvetat², Benjamin Walter³

¹LAAS-CNRS, Université de Toulouse, CNRS, 7 avenue du colonel Roche, F-31400 Toulouse, France.

Ultramicroscopy

|January 23, 2017

Summary

This summary is machine-generated.

Silicon micro-electro-mechanical resonators offer high-frequency probes for dynamic atomic force microscopy (AFM). These novel probes achieve superior displacement and force resolutions for advanced material surface analysis.

Keywords:

Atomic force microscopy (AFM)Block copolymers High frequency AFM probe Micro electromechanical resonators Micro electromechanical systems (MEMS)

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Last Updated: Mar 8, 2026

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Area of Science:

Materials Science
Nanotechnology
Physics

Background:

Traditional atomic force microscopy (AFM) probes have limitations in resonance frequency and resolution.
Micro-electro-mechanical systems (MEMS) offer potential for enhanced AFM probe performance.

Purpose of the Study:

To fabricate and evaluate silicon ring-shaped micro-electro-mechanical resonators as probes for dynamic AFM.
To assess the imaging capabilities and force resolution of these novel MEMS probes.

Main Methods:

Fabrication of silicon ring-shaped micro-electro-mechanical resonators.
On-chip electrical actuation and readout using capacitive transducers.
Noise analysis for displacement and force resolution determination.
AFM imaging in amplitude- and frequency-modulation modes.

Main Results:

Resonators achieved resonance frequencies above 10 MHz.
Achieved displacement resolution of 1.5 fm/√Hz and force resolution of 0.4 pN/√Hz.
Demonstrated imaging of block copolymer surfaces with controlled tip-surface interaction forces below 1 nN.
Z-spectroscopy revealed permanent contact with viscoelastic material.

Conclusions:

Silicon ring-shaped MEMS resonators are effective probes for high-resolution dynamic AFM.
These probes enable advanced surface characterization of materials, including viscoelastic ones.
The developed MEMS probes surpass conventional AFM cantilevers in key performance metrics.