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Fabricating Nanogaps by Nanoskiving

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Published on: May 13, 2013

Electrochemical micro/nano-machining: principles and practices.

Dongping Zhan¹, Lianhuan Han¹, Jie Zhang¹

¹State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Centre of Chemistry for Energy Materials (iChEM), and Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China. dpzhan@xmu.edu.cn zqtian@xmu.edu.cn.

Chemical Society Reviews

|February 8, 2017

Summary

Electrochemical micro/nano-machining (EC-MNM) offers eco-friendly, cost-effective manufacturing of precise micro/nano-structures. This review details EC-MNM techniques for advanced applications, focusing on confined electrochemical reactions.

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Area of Science:

Manufacturing Engineering
Materials Science
Electrochemistry

Background:

Growing demand for supersmooth surfaces and 3D micro/nano-structures (3D-MNS) in high-tech industries.
Micro/nano-machining (MNM) is crucial for integrated circuits, MEMS, and precision optics.
Electrochemical micro/nano-machining (EC-MNM) presents advantages like no tool wear and environmental friendliness.

Purpose of the Study:

To provide a comprehensive review of the state-of-the-art in EC-MNM techniques.
To highlight solutions for confining electrochemical reactions at the micro/nano-scale.
To cover applications in direct writing, surface finishing, and 3D-MNS fabrication.

Main Methods:

Review of existing literature on EC-MNM.
Analysis of techniques for electrochemical reaction confinement.
Categorization of methods based on electrochemical principles and technical characteristics.

Main Results:

EC-MNM is a key enabling technology for advanced manufacturing.
Effective strategies exist for controlling electrochemical reactions at the micro/nano-scale.
Diverse applications demonstrate the versatility of EC-MNM.

Conclusions:

EC-MNM plays an irreplaceable role in modern MNM.
Understanding confined electrochemical reactions is vital for EC-MNM advancements.
The review consolidates knowledge on EC-MNM principles, techniques, and applications.