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Degradation mechanisms in gate-all-around silicon Nanowire field effect transistor under electrostatic discharge

Cher Ming Tan1, Xiangchen Chen1

  • 1School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang, 639798 Singapore.

Nano Convergence
|February 14, 2017
PubMed

Keywords:
ESDHot carrier injectionOxide breakdownSentaurus simulationSilicon melting

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