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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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Electron-beam-induced-current and active secondary-electron voltage-contrast with aberration-corrected electron

Myung-Geun Han1, Joseph A Garlow2, Matthew S J Marshall3

  • 1Condensed Matter Physics & Materials Science, Brookhaven National Laboratory, Upton, NY 11973, USA.

Ultramicroscopy
|February 15, 2017
PubMed

Keywords:
Electric biasingElectron holographyElectrostatic potentialFerroelectric

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