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Infrared Plasmonics with Conductive Ternary Nitrides.

C Metaxa¹, S Kassavetis¹, J F Pierson²

¹Department of Physics, Aristotle University of Thessaloniki , GR-54124 Thessaloniki, Greece.

ACS Applied Materials & Interfaces

|March 8, 2017

Summary

Ternary transition metal nitrides offer tunable infrared plasmonic activity. TiₓSc₁₋ₓN and TiₓMg₁₋ₓN show promise, but high crystallinity is needed for optimal performance.

Keywords:

1. Surface Plasmon Polariton 2. Infrared 3. Conductive Nitrides 4. Conductor/Dielectric Interfaces

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Area of Science:

Materials Science
Nanotechnology
Solid State Physics

Background:

Conductive transition metal nitrides are refractory and CMOS-compatible plasmonic materials.
Ternary nitrides offer tunable plasmonic activity, unlike Ta-based nitrides.

Purpose of the Study:

Investigate tunable plasmonic activity of B1 structure ternary transition metal nitrides.
Identify promising nitride materials for infrared applications.

Main Methods:

Calculated surface plasmon polariton dispersion and field enhancement.
Considered intrinsic quality factors of surface plasmon polariton.

Main Results:

Ternary nitrides with group-IVb and group II/III elements show tunable infrared plasmonic activity.
TiₓSc₁₋ₓN and TiₓMg₁₋ₓN are promising, with TiₓSc₁₋ₓN active in telecom bands.
Electronic losses due to fine grains limit plasmonic field enhancement.

Conclusions:

Ternary nitrides are viable for tunable infrared plasmonics.
Improved fabrication processes are required for high-crystallinity nitrides and enhanced performance.