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Updated: Mar 6, 2026

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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Published on: February 5, 2020
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Voltage-induced waveguides in lithium niobate films on silicon substrates
Optics Letters
|March 16, 2017
Abstract:
Electrically tunable channel waveguides have been fabricated by domain inversion of a LiNbO3 thin film bonded to a silicon wafer. The electro-optic effect is used to induce the waveguides and to alter its guiding properties. A low amplitude electric signal can tune the voltage-induced structure from an efficient waveguide to an antiguide giving a waveguide transmission that varies over more than 25 dB. The frequency response of the components is given.

