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New Atom Probe Tomography Reconstruction Algorithm for Multilayered Samples: Beyond the Hemispherical Constraint.

Nicolas Rolland1, François Vurpillot1, Sébastien Duguay1

  • 11Groupe de Physique des Matériaux,Université et INSA de Rouen-UMR CNRS 6634-Normandie Université,76801 St Etienne du Rouvray,France.

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A new algorithm improves atom probe tomography accuracy for multilayered materials by correcting interface biases. This enhances resolution and provides more reliable thickness measurements, overcoming limitations of standard methods.

Keywords:
3D reconstructionatom probe tomographyfield evaporationmultilayerssimulation

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Nanotechnology

Background:

  • Atom probe tomography (APT) accuracy is compromised by varying material evaporation fields.
  • Perpendicular interfaces in multilayered samples lead to biased layer thicknesses and reduced resolution near interfaces.

Purpose of the Study:

  • To develop a novel 3D reconstruction algorithm for multilayered samples analyzed by APT.
  • To enhance the accuracy of thickness measurements and spatial resolution, particularly at interfaces.

Main Methods:

  • Developed a new algorithm based on an analytical model of field evaporated emitter end-form.
  • Performed simulations of field evaporation for bilayer systems to validate the algorithm.
  • Tested the algorithm's performance on experimental data.

Main Results:

  • The new algorithm significantly improves analyzed volume accuracy compared to standard methods.
  • Resolution is demonstrably enhanced near interfaces in multilayered samples.
  • Standard algorithms can introduce errors up to a factor of 2 in layer thickness measurements.

Conclusions:

  • The developed algorithm offers a more accurate 3D reconstruction for multilayered APT data.
  • This method overcomes the limitations of the hemispherical specimen shape assumption.
  • It provides superior accuracy and resolution for materials with complex interfaces.