Laguerre-Gauss beam generation in IR and UV by subwavelength surface-relief gratings

The angular momentum of light can be described by the states of spin angular momentum, associated with polarization, and orbital angular momentum, related to the helical structure of the wave front. Laguerre-Gaussian beams carry orbital angular momentum and their generation can be done by using an optical device known as q-plate. However, due to the usage of liquid crystals, these components may be restricted to operate in specific wavelengths and low power sources. Here we present the fabrication and characterization of q-plates made without liquid crystals, using processes of electron beam lithography, atomic layer deposition and dry etch techniques. We exploit the phenomenon of form birefringence to give rise to the spin-to-orbital angular momentum conversion. We demonstrate that these plates can generate beams with high quality for the UV and IR range, allowing them to interact with high power laser sources or inside laser cavities.