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Published on: August 12, 2013
Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental
Peng-Zhi Li1,2, Xiao-Dong Wang3, Yong-Xin Sui4
1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. lipengzhi@ciomp.ac.cn.
Sensors (Basel, Switzerland)
|April 12, 2017
Summary
This study introduces a new framework for piezoelectric actuated phase shifters, achieving high accuracy and repeatability. The developed system demonstrates excellent performance for precise phase shifting applications.
Area of Science:
- Mechanical Engineering
- Control Systems
- Nanotechnology
Background:
- Phase shifters are crucial components in various optical and electronic systems.
- Improving phase-shifting accuracy while managing cost is a significant engineering challenge.
- Existing piezoelectric actuators often face limitations in precision and integrated control.
Purpose of the Study:
- To present a novel integrated framework for the design, control, and validation of a piezoelectric actuated phase shifter.
- To achieve a balance between high accuracy and cost-effectiveness in phase shifter technology.
- To enhance the phase-shifting accuracy through a robust control strategy.
Main Methods:
- Utilizing piezoelectric actuators with integrated sensors to drive double parallel four-bar linkage flexure hinge mechanisms.
- Constructing a tripod structure using three such mechanisms for the phase shifter assembly.
- Implementing a semi-closed loop control system with inner feedback and outer feedforward loops, incorporating an external laser interferometer for precise positioning.
Main Results:
- Experimental validation demonstrated a linearity error of 0.21%.
- Repeatability error was measured at 3 nm for a 10 μm displacement.
- The integrated framework proved feasible and effective for precise phase shifter operation.
Conclusions:
- The developed piezoelectric actuated phase shifter exhibits excellent performance characteristics.
- The proposed integrated framework for design, control, and validation is effective and practical.
- This work offers a viable solution for applications requiring accurate and cost-efficient phase shifting.
