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Characterizing Patterned Block Copolymer Thin Films with Soft X-rays.

Daniel F Sunday1, Jiaxing Ren2, Christopher D Liman1

  • 1National Institute of Standards and Technology , Gaithersburg, Maryland 20899, United States.

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|May 26, 2017
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Summary
This summary is machine-generated.

Directed self-assembly of block copolymers uses templates to pattern integrated circuits. Varying template width relative to the copolymer pitch alters subsurface lamellar structure and polymer arrangement.

Keywords:
block copolymersdirected self-assemblyinverse problemsmall-angle X-ray scatteringsoft X-ray

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Polymer Science

Background:

  • Directed self-assembly (DSA) of block copolymers (BCPs) is crucial for advanced integrated circuit patterning.
  • Understanding template-BCP interactions is key to optimizing DSA processes.
  • Subsurface structural changes induced by templates require detailed investigation.

Purpose of the Study:

  • To investigate how template guiding stripe width influences BCP subsurface lamellar structure.
  • To determine the effect of the width-to-pitch ratio (W/L0) on BCP assembly.
  • To elucidate the mechanism of template-induced structural modifications.

Main Methods:

  • Utilized rotational transmission X-ray scattering with soft X-rays for enhanced polymer contrast.
  • Systematically varied the ratio of guiding stripe width (W) to BCP pitch (L0).
  • Analyzed lamellar structure and interface profiles at different heights within the BCP film.

Main Results:

  • Observed continuous vertical lamellae for W/L0 < 1, with initial interface fluctuations smoothing out.
  • Found that near W/L0 ≈ 1.5, the lamellar arrangement shifted.
  • Demonstrated a transition from polystyrene-centered to poly(methyl methacrylate)-centered alignment on the guiding stripe.

Conclusions:

  • The width-to-pitch ratio significantly impacts BCP self-assembly and subsurface structure.
  • Template geometry dictates the precise positioning and orientation of polymer domains.
  • This research provides critical insights for designing effective templates for future nanoelectronic devices.