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Updated: Mar 1, 2026

Evaluating the Electrochemical Properties of Supercapacitors using the Three-Electrode System
Published on: January 7, 2022
Carbon-MEMS-Based Alternating Stacked MoS2 @rGO-CNT Micro-Supercapacitor with High Capacitance and Energy Density
Wei Yang1, Liang He1,2, Xiaocong Tian1
1State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan, 430070, P. R. China.
Abstract:
A novel process to fabricate a carbon-microelectromechanical-system-based alternating stacked MoS2 @rGO-carbon-nanotube (CNT) micro-supercapacitor (MSC) is reported. The MSC is fabricated by successively repeated spin-coating of MoS2 @rGO/photoresist and CNT/photoresist composites twice, followed by photoetching, developing, and pyrolysis. MoS2 @rGO and CNTs are embedded in the carbon microelectrodes, which cooperatively enhance the performance of the MSC. The fabricated MSC exhibits a high areal capacitance of 13.7 mF cm-2 and an energy density of 1.9 µWh cm-2 (5.6 mWh cm-3 ), which exceed many reported carbon- and MoS2 -based MSCs. The MSC also retains 68% of capacitance at a current density of 2 mA cm-2 (5.9 A cm-3 ) and an outstanding cycling performance (96.6% after 10 000 cycles, at a scan rate of 1 V s-1 ). Compared with other MSCs, the MSC in this study is fabricated by a low-cost and facile process, and it achieves an excellent and stable electrochemical performance. This approach could be highly promising for applications in integration of micro/nanostructures into microdevices/systems.
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