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Aspheric Surface Measurement Using Capacitive Sensors.

Daocheng Yuan1,2, Huiying Zhao3, Xin Tao4

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China. 18608160633@wo.cn.

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Summary
This summary is machine-generated.

This study introduces a non-contact capacitive sensor method for precise measurement of aspheric surfaces. The technique achieves high accuracy through nonlinear and linear compensation, enabling nanometer-level precision for electromagnetic surfaces.

Keywords:
aspheric surface measurementcapacitive probeelectromagnetic surfaceerror compensation

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Area of Science:

  • Metrology
  • Surface Science
  • Sensor Technology

Background:

  • Accurate measurement of aspheric surfaces is crucial in advanced manufacturing.
  • Non-contact measurement methods are preferred to avoid surface damage.
  • Capacitive sensing offers potential for high-precision metrology.

Purpose of the Study:

  • To propose and validate a novel capacitive sensing method for measuring aspheric surfaces.
  • To investigate the effects of probe averaging and tilting on measurement accuracy.
  • To demonstrate the feasibility of nm-level precision measurement.

Main Methods:

  • Utilized capacitive sensors as a non-contact probe.
  • Studied the average effect of the capacitive probe on eccentric spherical surfaces.
  • Analyzed the influence of capacitive probe tilting.
  • Applied nonlinear and linear compensation techniques.

Main Results:

  • Established a characteristic curve for the average effect of sphere and probe.
  • Demonstrated that nonlinear and linear compensation significantly improve measurement accuracy.
  • Validated the capability for nm-level precision measurement.

Conclusions:

  • The proposed capacitive sensing method provides a viable solution for non-contact measurement of aspheric surfaces.
  • Compensation strategies are effective in achieving high accuracy.
  • The technology meets the demand for nm-level precision in aspheric electromagnetic surface metrology.