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A Small Spot, Inert Gas, Ion Milling Process as a Complementary Technique to Focused Ion Beam Specimen Preparation

Paul E Fischione1, Robert E A Williams2, Arda Genç2

  • 11E.A. Fischione Instruments Inc.,9003 Corporate Circle,Export,PA 15632,USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|June 20, 2017
PubMed

Keywords:
amorphous damageartifactfocused ion beamimplantationion milling

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