Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation

Area of Science:

• Physics
• Materials Science
• Engineering

Background:

• Scanning Electron Microscope (SEM)-based X-ray tomography systems generate X-rays via electron beam-anode interaction.
• Electron beam drift can degrade X-ray flux and image resolution, limiting system performance.
• High-performance X-ray detection is crucial for detailed imaging.

Purpose of the Study:

• To describe recent improvements in an SEM-based X-ray tomography system.
• To address electron beam drift issues impacting X-ray flux and spatial resolution.
• To evaluate the system's performance for microelectronics, technical textile, and material science applications.

Main Methods:

• Integration of a closed-loop control system with Fast Fourier Transform (FFT)-based image correlation for in-line drift correction.
• Utilizing a state-of-the-art scientific CMOS camera with high quantum efficiency (~60%) and low read-out noise (~1.2 electrons) for X-ray detection (indirect detection).
• Performance evaluation based on resolution, detectability, and scanning times.

Main Results:

• Successful implementation of an in-line drift correction system mitigating e-beam instability.
• High-quality X-ray detection achieved with a scientific CMOS camera.
• Demonstrated system efficacy across diverse fields including microelectronics, technical textiles, and material science.

Conclusions:

• The improved SEM-based X-ray tomography system offers enhanced stability and resolution.
• The integrated drift correction and advanced detector improve imaging capabilities.
• The system is suitable for demanding applications in microelectronics, technical textiles, and material science.