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Related Concept Videos

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Microcrystal Electron Diffraction of Small Molecules
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Retrieving overlapping crystals information from TEM nano-beam electron diffraction patterns.

A Valery1,2, E F Rauch2, L Clément1

  • 1Physical Characterization group, STMicroelectronics, Crolles, France.

Journal of Microscopy
|July 5, 2017
PubMed
Summary
This summary is machine-generated.

A new transmission electron microscope (TEM) method separates overlapping crystal signals in diffraction patterns. This technique enhances crystal orientation mapping by subtracting dominant signals for improved grain identification.

Keywords:
ACOM-TEMcrystallographic orientationphase mappingprecession electron diffractiontemplate matchingtransmission electron microscopy

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Area of Science:

  • Materials Science
  • Crystallography
  • Electron Microscopy

Background:

  • Transmission electron microscopy (TEM) diffraction patterns contain superimposed Bragg reflections from multiple crystals.
  • Indexing these patterns is challenging due to signal overlap, limiting orientation and phase characterization.
  • Current TEM-based orientation and phase characterization techniques face limitations in resolving signals from distinct, overlapped grains.

Purpose of the Study:

  • To introduce a novel method for distinguishing and analyzing information from overlapped crystal grains in TEM diffraction patterns.
  • To improve the accuracy and capability of automated crystal orientation mapping (ACOM-TEM) by addressing signal superposition.

Main Methods:

  • A new method involving subtracting the dominant crystal's signature from the diffraction pattern before reindexing.
  • Coupling this subtraction technique with the template matching algorithm used in ACOM-TEM.
  • Application and validation of the method on NiSi thin films and polycrystalline tungsten electrical contacts.

Main Results:

  • Successfully demonstrated the capability to identify information from distinct but overlapped grains.
  • Illustrated the method's effectiveness in characterizing NiSi thin films on monocrystalline Si.
  • Showcased the technique's ability to recognize small, nondominant grains in polycrystalline tungsten using a subtracting-indexing cycle.

Conclusions:

  • The developed subtraction-based method significantly enhances the analysis of complex TEM diffraction patterns.
  • This approach overcomes the limitation of signal nondissociation, enabling more accurate crystal orientation and phase characterization.
  • The technique is effective for identifying both dominant and nondominant grains, advancing materials characterization in thin films and nanostructures.