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A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
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Three-dimensional integration of nanotechnologies for computing and data storage on a single chip
Max M Shulaker1,2, Gage Hills1, Rebecca S Park1
1Department of Electrical Engineering, Stanford University, Stanford, California, USA.
Nature
|July 7, 2017
Summary
Researchers developed a novel 3D integrated circuit using over a million resistive random-access memory cells and two million carbon-nanotube field-effect transistors. This transformative nanosystem enables efficient on-chip data processing and storage for data-intensive applications.
Area of Science:
- Nanosystems Engineering
- Advanced Materials Science
- Integrated Circuit Design
Background:
- Current electronics face limitations in meeting future data-intensive application demands.
- Isolated improvements in transistors, storage, or architectures are insufficient.
- Transformative nanosystems integrating new nanotechnologies are required.
Purpose of the Study:
- To present a prototype of a transformative nanosystem.
- To demonstrate a 3D integrated circuit architecture with dense vertical connectivity.
- To showcase a system capable of on-chip data capture, storage, and in situ processing.
Main Methods:
- Fabrication of a nanosystem with over one million resistive random-access memory cells.
- Integration of more than two million carbon-nanotube field-effect transistors.
- Development of vertically stacked layers for a 3D integrated circuit architecture.
Main Results:
- The nanosystem achieves fine-grained, dense vertical connectivity between computing, storage, and sensing layers.
- It can capture, store, and process massive data amounts in situ, producing highly processed information.
- A working prototype successfully senses and classifies ambient gases.
Conclusions:
- The developed nanosystem represents a significant advancement towards high-performance, energy-efficient electronics.
- Its compatibility with silicon logic circuitry ensures integration with existing infrastructure.
- Such complex nano-electronic systems are crucial for future computing demands.

