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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Aberration measurement of the probe-forming system of an electron microscope using two-dimensional materials

Hidetaka Sawada1, Christopher S Allen2, Shanshan Wang3

  • 1Electron Physical Sciences Imaging Centre (ePSIC), Diamond Light Source Ltd, Didcot, Oxford OX11 0DE, UK; Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK; JEOL UK Ltd., Silver Court Watchmead Welwyn Garden City, Herts AL7 1LT, UK; Research acceleration program, Japan Science and Technology Agency, K's Gobancho, 7, Gobancho, Chiyoda-ku, Tokyo 102-0076, Japan.

Ultramicroscopy
|July 15, 2017
PubMed

Keywords:
Aberration correctorChromatic aberrationGeometric aberrationRonchigramSTEM

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