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Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry.

J S Villarrubia¹, V N Tondare¹, A E Vladár¹

¹Engineering Physics Division, Physical Measurements Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, USA 20899.

Proceedings of Spie--The International Society for Optical Engineering

|July 25, 2017

Summary

This summary is machine-generated.

This study introduces a virtual sample method to test 3D photogrammetry software for nanometer-scale dimensional metrology. Two of three tested software packages accurately reconstructed line height and width within 1 nm of true values.

Keywords:

critical dimension (CD)dimensional metrology model-based metrology scanning electron microscopy (SEM)simulation stereo photogrammetry surface roughness virtual sample

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Area of Science:

Materials Science
Metrology
Computer Vision

Background:

3D photogrammetry offers potential for nanometer-scale dimensional metrology.
Evaluating the accuracy of 3D reconstruction software is crucial for reliable measurements.

Purpose of the Study:

To develop and validate a method for testing 3D photogrammetry software using virtual samples.
To assess the performance of commercial 3D photogrammetry packages for nanometer-scale metrology.

Main Methods:

A virtual sample with a defined geometry and surface roughness was created.
Simulated images from multiple viewpoints were generated for input into photogrammetry software.
Reconstructed 3D models were compared against the known virtual sample geometry.

Main Results:

Two out of three commercial photogrammetry software packages achieved line height and width accuracy within approximately 1 nm.
All tested software packages encountered challenges in accurately reconstructing surface roughness details.

Conclusions:

Virtual samples provide a reliable method for evaluating 3D photogrammetry software accuracy.
Current commercial software shows promise for dimensional metrology but requires improvement for surface roughness analysis.