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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Graphene-Contacted Ultrashort Channel Monolayer MoS2 Transistors
Li Xie1,2, Mengzhou Liao1,2, Shuopei Wang1,2
1Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.
Researchers developed a grain boundary widening technique to create graphene electrodes for ultrathin molybdenum disulfide (MoS2) field-effect transistors (FETs). This enables reliable fabrication of ≈4 nm channel length FETs with excellent performance and short-channel effect immunity.
Area of Science:
- Materials Science
- Nanotechnology
- Electronics Engineering
Background:
- Two-dimensional (2D) semiconductors offer potential for advanced transistors due to inherent immunity to short-channel effects (SCEs).
- Contacting ultrathin 2D materials like monolayer molybdenum disulfide (MoS2) at the nanoscale remains a significant fabrication challenge.
- Achieving reliable and high-performance field-effect transistors (FETs) with minimal channel lengths is crucial for next-generation electronics.
Purpose of the Study:
- To develop a novel technique for fabricating graphene electrodes suitable for contacting monolayer MoS2.
- To investigate the performance of ultrashort channel MoS2 FETs with these novel graphene contacts.
- To demonstrate the feasibility of creating highly scaled 2D material-based electronic devices.
Main Methods:
- A grain boundary widening technique was employed to engineer graphene electrodes.
- Monolayer MoS2 was used as the channel material in field-effect transistors (FETs).
- Fabrication focused on achieving channel lengths down to approximately 4 nanometers.
Main Results:
- Reliable fabrication of ultrashort channel MoS2 FETs with channel lengths down to ≈4 nm was achieved.
- The fabricated FETs exhibited superior performance characteristics.
- Nearly Ohmic contacts were realized, and excellent immunity to short-channel effects (SCEs) was observed.
Conclusions:
- The developed grain boundary widening technique provides a facile and effective route for fabricating graphene contacts for 2D materials.
- Ultrashort channel MoS2 FETs with graphene electrodes demonstrate promising performance for scaled electronics.
- This approach facilitates the development of various 2D material-based devices for future ultrascaled electronic applications.
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