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Published on: May 13, 2020
Conduction Mechanisms in Resistance Switching Memory Devices Using Transparent Boron Doped Zinc Oxide Films
1Department of Electronic Engineering, Ming Chuan University, 5 De-Ming Rd., Gui-Shan, Taoyuan 33348, Taiwan. fcchiu@mail.mcu.edu.tw.
Transparent boron-doped zinc oxide (ZnO:B) films show promise for nonpolar resistance switching memory. These films exhibit a high resistance ratio (10⁵) and enable determination of trap energy levels.
Area of Science:
- Materials Science
- Solid-State Physics
- Device Engineering
Background:
- Transparent conductive oxides (TCOs) are crucial for electronic devices.
- Zinc oxide (ZnO) based materials offer tunable electronic properties.
- Resistance switching memory (RRAM) is a promising next-generation memory technology.
Purpose of the Study:
- To fabricate and investigate metal/oxide/metal capacitors using transparent boron-doped zinc oxide (ZnO:B) films.
- To evaluate the suitability of ZnO:B films for resistance switching memory applications.
- To understand the conduction mechanisms and material properties of ZnO:B films in memory devices.
Main Methods:
- Fabrication of metal/oxide/metal capacitors with W/ZnO:B/W structure.
- Optical characterization to determine optical band gap and transmittance.
- Electrical characterization including current-voltage (I-V) measurements at various temperatures.
- Analysis of resistance switching behavior (nonpolar, resistance ratio).
- Investigation of conduction mechanisms in high resistance state (HRS) and low resistance state (LRS).
Main Results:
- ZnO:B films exhibited an optical band gap of ~3.26 eV and ~91% transmittance in the visible light region.
- The W/ZnO:B/W structure demonstrated nonpolar resistance switching.
- A high resistance ratio of approximately 10⁵ between HRS and LRS was achieved at room temperature.
- Hopping conduction dominated in HRS, while Ohmic conduction prevailed in LRS.
- Trap spacing of 1.2 nm and trap energy levels in ZnO:B films were determined.
Conclusions:
- Transparent boron-doped zinc oxide is a viable material for nonpolar resistance switching memory.
- The observed high resistance ratio and distinct conduction mechanisms are beneficial for memory applications.
- The ability to determine trap parameters provides insights into the switching physics and material optimization.
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