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Updated: Feb 25, 2026

Writing and Low-Temperature Characterization of Oxide Nanostructures
Published on: July 18, 2014
Trap Exploration in Amorphous Boron-Doped ZnO Films
Fu-Chien Chiu1, Wen-Ping Chiang2
1Department of Electronic Engineering, Ming Chuan University, 5 De-Ming Rd., Gui-Shan, Taoyuan 33348, Taiwan. fcchiu@mail.mcu.edu.tw.
This study explores traps in amorphous boron-doped zinc oxide (ZnO:B) films using a Ni/ZnO:B/TaN structure. Multiple-level traps were identified, with energy levels between 0.46-0.64 eV and spacing of 1.1 nm.
Area of Science:
- Materials Science
- Solid State Physics
- Semiconductor Devices
Background:
- Amorphous boron-doped zinc oxide (ZnO:B) films are investigated for electronic applications.
- Understanding charge transport mechanisms is crucial for device performance.
Purpose of the Study:
- To explore trap characteristics in amorphous ZnO:B films.
- To analyze the conduction mechanisms in a metal-oxide-metal asymmetric structure.
- To determine trap energy levels and spacing.
Main Methods:
- Fabrication of Ni/ZnO:B/TaN devices using RF magnetron sputtering.
- Analysis of current-voltage (I-V) characteristics at various temperatures.
- Investigation of conduction mechanisms under different bias voltages.
Main Results:
- Ohmic conduction observed at positive bias due to TaN/ZnO:B interface.
- Hopping conduction observed at negative bias attributed to ZnO:B film traps.
- Temperature dependence of I-V characteristics indicates multiple-level traps.
Conclusions:
- Amorphous ZnO:B films contain multiple-level traps, not single-level traps.
- Extracted trap energy levels range from 0.46 to 0.64 eV.
- Extracted trap spacing is approximately 1.1 nm.
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