Trap Exploration in Amorphous Boron-Doped ZnO Films

Fu-Chien Chiu1, Wen-Ping Chiang2

  • 1Department of Electronic Engineering, Ming Chuan University, 5 De-Ming Rd., Gui-Shan, Taoyuan 33348, Taiwan. fcchiu@mail.mcu.edu.tw.

Summary

This study explores traps in amorphous boron-doped zinc oxide (ZnO:B) films using a Ni/ZnO:B/TaN structure. Multiple-level traps were identified, with energy levels between 0.46-0.64 eV and spacing of 1.1 nm.

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