An Optimization and Comparative Study of Air-Coupled CMUT Cells With Circular and Annular Geometries

Air-coupled capacitive micromachined ultrasonic transducers (CMUTs) with annular cell geometry have recently been reported to have a promising transmit sensitivity. This paper reports three optimization schemes, which further improve the transmit sensitivity and also help achieve a reasonable comparison between the novel annular and conventional circular cells. Lumped element models of both cell types with laminate plate structures are presented. Based on these models, a design optimization flowchart was constructed to facilitate analytical optimization on the three schemes. Circular and annular CMUTs with a common 97-kHz natural resonance frequency were fabricated and characterized to verify the efficacy of the optimization principle. Using the optimization flowchart, annular and circular cells with frequencies ranging from 100 to 300 kHz were analytically optimized and then compared. The comparison results demonstrate that, given the same dc bias and ac excitation voltage, the output power density at the plate surface of the optimized annular cell is double that of the optimized circular cell. Additionally, when generating the same surface power density, an optimized annular cell requires either half the dc bias or half the ac excitation voltage of an optimized circular cell. This paper provides a practical optimization framework for CMUT cell design and demonstrates the superiority of annular cells for air-coupled applications.