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Updated: Feb 24, 2026
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth
Bao Q Ta1, Tormod B Haugen2, Nils Hoivik3
1Department of Micro and Nano Systems Technology (IMST), Vestfold University College (HiVe), P.O. Box 2243, Tonsberg N-3130, Norway. quoc.bao@hive.no.
Abstract:
Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy-S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs: high temperature favors thin and regular structures, whereas low temperature favors "bamboo-like" structures.
