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Extrinsic and Intrinsic Frequency Dispersion of High-k Materials in Capacitance-Voltage Measurements

J Tao1, C Z Zhao2,3,4, C Zhao5,6

  • 1Department of Microelectronics, Xi'an Jiaotong University, Xi'an 710016, China. tj.19861225@stu.xjtu.edu.cn.

Materials (Basel, Switzerland)
|August 18, 2017
PubMed

Keywords:
dielectric relaxationfrequency dispersionhigh-k dielectrics

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