Implementation of guiding layers of surface acoustic wave devices: A review

The purpose of overviewing research and development status of dependable, efficient, and portable and miniaturized surface acoustic wave (SAW) is to propose practical devices for biosensing and medical diagnosis. SAW Love-mode sensors fortunately have a great deal of attention during last two decades. Several periodic structure models of SAW devices were reviewed, especially interdigital transducers (IDTs), wave guiding layers, patterned-ZnO. SAW devices based on such periodic wave guiding layers and patterned-ZnO were demonstrated with superior performance, much better than conventional SAW devices. Both 2D and 3D models of phononic-crystal-based SAW devices can be respectively fabricated by an array of periodic cylindrical holes and pillars, which allowed SAW devices to have both higher Q-factor and GHz-level frequency. Ring waveguide and spherical SAW devices would have potential applications and implementation in biosensing. ZnO is one of attractive guiding-layer materials. Its nanostructures, such as nanowires, nanorods and nanofibers provided with excellent properties, will make nanoscaled SAW devices contribute to be much more sensitive in biosensors. A range of applications based on SAW and ZnO guiding-layer would be therefore expected among of immunochemical analysis, in-situ virus or bacteria determination, microfluidic automation, and cell manipulation.