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Novel nanofluidic chemical cells based on self-assembled solid-state SiO2 nanotubes
Hao Zhu1, Haitao Li2,3, Joseph W F Robertson2
1State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China.
Nanotechnology
|August 31, 2017
Summary
Researchers developed novel nanofluidic chemical cells using self-assembled silicon dioxide (SiO2) nanotubes on a silicon-on-insulator (SOI) substrate. This clean fabrication method offers precise control for advanced chemical and biosensing applications.
Area of Science:
- Nanotechnology
- Materials Science
- Chemical Engineering
Background:
- Development of advanced nanofluidic devices is crucial for high-resolution chemical and biological analysis.
- Existing fabrication methods for nanostructures often involve complex procedures and may compromise device cleanliness.
Purpose of the Study:
- To fabricate and characterize novel nanofluidic chemical cells utilizing self-assembled solid-state silicon dioxide (SiO2) nanotubes.
- To demonstrate a clean and efficient fabrication process for creating well-controlled nanotube structures.
Main Methods:
- Epitaxial growth of silicon (Si) nanowires on a silicon-on-insulator (SOI) substrate.
- Fabrication of vertical SiO2 nanotubes with smooth cavities via dry oxidation of Si nanowires.
- Characterization of the fabricated nanotube structures and their integration into nanofluidic cells.
Main Results:
- Successful fabrication of vertical SiO2 nanotubes with rigid, dry-oxidized walls and precisely controlled inner diameters.
- Demonstration of a clean fabrication process without dispersion or aligning steps, resulting in smooth chemical cells.
- Validation of the nanotube structures for potential use in chemical and biosensing.
Conclusions:
- The developed SiO2 nanotubes offer a robust and well-controlled platform for functional nanomaterials.
- This technology merges top-down lithography with bottom-up growth for advanced nanomaterial development.
- The fabricated nanofluidic devices show significant promise for future biomedical applications, including single molecule sensing and DNA sequencing.
