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Updated: Feb 23, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Brecht Laforce1, Bert Masschaele2,3, Matthieu N Boone2
1X-ray Microspectroscopy and Imaging group (XMI), Department of Analytical Chemistry, Ghent University , Krijgslaan 281 S12, B-9000 Ghent, Belgium.
A new instrument, Herakles, integrates X-ray computed tomography (μCT), X-ray fluorescence tomography (XRF-CT), and confocal XRF for 3D elemental and morphological analysis. This provides unprecedented detail linking chemical composition to structure in materials.
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