Numerical modeling of specimen geometry for quantitative energy dispersive X-ray spectroscopy

Transmission electron microscopy specimens typically exhibit local distortion at thin foil edges, which can influence the absorption of X-rays for quantitative energy dispersive X-ray spectroscopy (EDS). Here, we report a numerical, three-dimensional approach to model the geometry of general specimens and its influence on quantification when using single and multiple detector configurations. As a function of specimen tilt, we show that the model correctly predicts the asymmetric nature of X-ray counts and ratios. When using a single detector, we show that complex specimen geometries can introduce significant uncertainty in EDS quantification. Further, we show that this uncertainty can be largely negated by collection with multiple detectors placed symmetrically about the sample such as the FEI Super-X configuration. Based on guidance provided by the model, we propose methods to reduce quantification error introduced by the sample shape. The source code is available at https://github.com/subangstrom/superAngle.