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Related Experiment Video

Updated: Feb 23, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

Published on: April 1, 2020

Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications.

Pascual Muñoz^1,2, Gloria Micó³, Luis A Bru⁴

¹Photonics Research Labs, Universitat Politècnica de València, c/ Camino de Vera s/n, 46021 Valencia, Spain. pascual.munoz@upv.es.

Sensors (Basel, Switzerland)

|September 13, 2017

Summary

Silicon nitride photonics offers broad applications due to its material properties. This review details advanced silicon nitride waveguide platforms for versatile optical technologies.

Keywords:

birefringence full-field optical measurements generic integration group index group velocity dispersion multi-project wafer photonic integrated circuits propagation loss silicon nitride photonics silicon photonics

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Last Updated: Feb 23, 2026

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Area of Science:

Integrated photonics
Materials science
Optical engineering

Background:

Silicon nitride (SiN) photonics leverages broadband material properties for diverse applications.
These applications span biophotonics, telecommunications, data communications, optical signal processing, and sensing.
The operational wavelength range extends from visible to mid-infrared.

Purpose of the Study:

To review the current state-of-the-art in silicon nitride strip waveguide platforms.
To present experimental results on a novel 300 nm guiding film height silicon nitride platform.

Main Methods:

Literature review of silicon nitride waveguide technologies.
Experimental fabrication and characterization of a 300 nm film height SiN platform.

Main Results:

Comprehensive overview of existing SiN waveguide platforms.
Demonstration of a versatile 300 nm guiding film height SiN platform.

Conclusions:

Silicon nitride waveguide platforms are crucial for advancing integrated photonics.
The developed 300 nm platform shows promise for a wide range of optical applications.