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A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure.
Yu-Hsiang Wang1, Chia-Yen Lee2, Che-Ming Chiang3
1Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua, Taiwan.
Sensors (Basel, Switzerland)
|September 15, 2017
Summary
This study introduces a novel micro-scale air flow sensor utilizing a free-standing micro-cantilever. This MEMS-fabricated device offers high sensitivity and rapid response for accurate air velocity measurement.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Sensor Technology
- Fluid Dynamics
Background:
- Accurate air flow measurement is crucial in various applications.
- Existing micro-scale sensors often face limitations in sensitivity or response time.
Purpose of the Study:
- To develop and characterize a novel micro-scale air flow sensor.
- To leverage microelectromechanical systems (MEMS) for enhanced sensor performance.
Main Methods:
- Fabrication of a free-standing micro-cantilever using MEMS techniques.
- Deposition of silicon nitride and platinum layers to create a piezoresistor.
- Measurement of air flow velocity via resistance change in the piezoresistor using an LCR meter.
Main Results:
- The micro-scale air flow sensor demonstrated high sensitivity (0.0284 ω/ms⁻¹).
- A high velocity measurement limit of 45 ms⁻¹ was achieved.
- The sensor exhibited a rapid response time of 0.53 seconds.
Conclusions:
- The developed MEMS-based micro-cantilever air flow sensor is highly sensitive and responsive.
- This technology offers a promising solution for micro-scale air velocity detection.
- The sensor's performance metrics suggest suitability for demanding applications.
