Takeo Minamikawa1,2, Yi-Da Hsieh3,4, Kyuki Shibuya3,4
1Graduate School of Technology, Industrial and Social Sciences, Tokushima University, 2-1 Minami-Josanjima, Tokushima, 770-8506, Japan. minamikawa.takeo@tokushima-u.ac.jp.
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Dual-comb spectroscopic ellipsometry (DCSE) offers ultra-high spectral resolution for material optical property analysis. This novel method eliminates polarization modulation, enhancing stability and overcoming conventional limitations in spectroscopic ellipsometry.
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