Peng Gao1, Akihito Kumamoto2, Ryo Ishikawa2
1Institute of Engineering Innovation, School of Engineering, University of Tokyo, Tokyo 113-8656, Japan; Electron Microscopy Laboratory, and International Center for Quantum Materials, School of Physics, Peking University, Beijing 100871, China; Collaborative Innovation Center of Quantum Matter, Beijing 100871, China.
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Specimen mistilt in annular bright-field scanning transmission electron microscopy (ABF-STEM) can cause significant picometer-scale measurement errors. This study quantifies tilt effects, revealing they dominate over scan noise and drift in atomic structure analysis.
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