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Atomic Force Microscopy

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Sub-nanometer Resolution Imaging with Amplitude-modulation Atomic Force Microscopy in Liquid

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Published on: December 20, 2016

Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy.

Maarten H van Es¹, Abbas Mohtashami¹, Rutger M T Thijssen¹

¹NOMI, Optomechatronics, TNO, Stieltjesweg 1, 2628CK, Delft, The Netherlands.

Ultramicroscopy

|October 3, 2017

Summary

This summary is machine-generated.

Subsurface ultrasonic resonance force microscopy (SSURFM) enables nondestructive nanoimaging of buried nanostructures. This advancement offers new industrial solutions for metrology and inspection of critical nanotechnology components.

Keywords:

Buried features Scanning probe Subsurface microscopy Ultrasound

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Area of Science:

Materials Science
Nanotechnology
Physics

Background:

Nondestructive subsurface nanoimaging of buried nanostructures is crucial for advanced manufacturing.
Scanning probe microscopy (SPM) offers nanometer resolution but struggles with subsurface imaging.
Ultrasound SPM has shown potential for imaging buried nanoscale features.

Purpose of the Study:

To develop a modified ultrasound SPM technique for enhanced subsurface nanoimaging.
To demonstrate the capability and versatility of the new method on various buried nanostructures.
To report on the tuning and optimization of image contrast for improved visualization.

Main Methods:

Development of subsurface ultrasonic resonance force microscopy (SSURFM), a modified ultrasound SPM.
Application of SSURFM to image various buried nanostructures, including those under soft, multiple, and rigid matrices.
Experimental optimization of image contrast parameters.

Main Results:

Successful subsurface imaging of aluminum nanostructures buried under polymer, polymer/titanium, and silicon oxide layers.
Demonstration of SSURFM's capability to resolve buried rigid structures.
Optimization of image contrast achieved through parameter tuning.

Conclusions:

SSURFM is a versatile and effective method for nondestructive subsurface nanoimaging.
The technique provides potential industrial metrology and inspection solutions for nanostructures.
This advancement supports the reliable manufacturing of nanotechnology products like 3D transistors and quantum electronics.