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Open and closed-loop control systems01:17

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Phase-lead controllers are commonly used in various control systems to enhance response speed and stability. Adjusting the brightness on a television screen offers a practical example of phase-lead control. When contrast is enhanced, a phase-lead controller is employed. Mathematically, phase-lead control is identified when the first parameter is smaller than the second.
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Rise Time Reduction of Thermal Actuators Operated in Air and Water through Optimized Pre-Shaped Open-Loop Driving.

T Larsen1, J C Doll1, F Loizeau1

  • 1Department of Mechanical Engineering, Stanford University, Stanford, California, 94305, USA.

Journal of Micromechanics and Microengineering : Structures, Devices, and Systems
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Electrothermal actuators in Micro-Electro-Mechanical Systems (MEMS) achieve faster speeds using pre-shaped signals. This method significantly reduces actuator rise times in both air and water, enhancing their applicability.

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Area of Science:

  • Micro-Electro-Mechanical Systems (MEMS)
  • Actuator Technology
  • Control Systems

Background:

  • Electrothermal actuators offer advantages in MEMS, including simple design, fabrication, and large displacements at low voltages.
  • However, their operational speed is often limited by thermal time constants, restricting bandwidth with standard inputs.
  • Existing high-speed MEMS actuators like piezoelectric or electrostatic types can be complex to design and fabricate.

Purpose of the Study:

  • To investigate the use of pre-shaped input signals to overcome the speed limitations of electrothermal actuators.
  • To experimentally determine the transfer functions of an electrothermal cantilever in air and water.
  • To demonstrate a significant reduction in actuator rise time using a simple control strategy.

Main Methods:

  • Characterized the linearity and frequency response of an electrothermal cantilever in air and water.
  • Obtained transfer functions for the actuator in both environments.
  • Numerically simulated pre-shaped input signals based on transfer functions and desired response characteristics.

Main Results:

  • Reduced the 10-90% rise time of an electrothermal cantilever from 85 μs to 3 μs in air (28x improvement).
  • Reduced the 10-90% rise time from 234 μs to 5 μs in water (47x improvement).
  • Demonstrated a significant increase in bandwidth for MEMS electrothermal actuators.

Conclusions:

  • Pre-shaped input signals offer a simple yet effective control strategy to dramatically enhance the speed of MEMS electrothermal actuators.
  • This approach makes electrothermal actuators a competitive alternative to more complex high-speed MEMS actuator technologies.
  • The findings open possibilities for wider adoption of electrothermal actuators in high-frequency MEMS applications.