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Classical ghost-imaging spectral ellipsometer.

Antti Hannonen, Ari T Friberg, Tero Setälä

    Journal of the Optical Society of America. A, Optics, Image Science, and Vision
    |October 17, 2017
    PubMed
    Summary
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    This study presents a new imaging ghost ellipsometer for analyzing inhomogeneous thin films. The novel method uses classical light to provide spectral characterization, reducing calibration needs and improving accuracy.

    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Spectroscopy

    Background:

    • Traditional ellipsometry faces challenges in characterizing inhomogeneous thin films and interfaces.
    • Instrumentation errors and calibration requirements limit the accuracy and applicability of conventional methods.

    Purpose of the Study:

    • To introduce a novel imaging ghost ellipsometer for spectral characterization of inhomogeneous thin films and interfaces.
    • To demonstrate a method that is insensitive to instrumentation errors and eliminates the need for source/detector calibration.

    Main Methods:

    • Utilizing an imaging ghost ellipsometer with classical light exhibiting Gaussian statistics.
    • Developing formalisms for spectral characterization of both one-dimensional and two-dimensional samples.

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    Main Results:

    • The device output yields ellipsometric information linked to fractional Fourier transforms of sample reflection coefficients.
    • In specific scenarios, this information simplifies to Fourier transforms or direct imaging of the sample.
    • The proposed method exhibits robustness against instrumentation inaccuracies.

    Conclusions:

    • The developed imaging ghost ellipsometer offers a powerful and calibration-free approach for spectral characterization.
    • This technique enhances the analysis of complex thin film and interface structures.
    • The method broadens the scope of ellipsometry for materials characterization.