Improved performance of multi-view fringe projection 3D microscopy

Area of Science:

• Optics and Photonics
• Metrology
• Micro-manufacturing

Background:

• Fringe projection 3D microcopy (FP-3DM) is vital for micro-scale manufacturing and measurement.
• Existing FP-3DM methods face challenges with limited depth of field, specular reflection, and occlusion.
• Addressing these limitations is crucial for advancing micro-scale 3D imaging.

Purpose of the Study:

• To introduce a novel multi-view FP-3DM (MVFP-3DM) system.
• To overcome the inherent limitations of conventional FP-3DM techniques.
• To enhance the accuracy and scope of 3D micro-measurement.

Main Methods:

• Development of an MVFP-3DM system incorporating four Scheimpflug imaging branches and one vertical projection branch.
• Utilization of a general imaging model independent of specific system configurations for calibration.
• Employing binary fringe edge detection for robust benchmark localization, unaffected by focus variations.

Main Results:

• The proposed MVFP-3DM system demonstrated an extended measurable depth range.
• Significant improvements in the precision of 3D reconstruction were achieved.
• The system effectively reduced issues related to occlusion in micro-scale measurements.

Conclusions:

• The MVFP-3DM system offers a robust solution for advanced 3D micro-measurement.
• The innovative system design addresses key limitations, enhancing performance.
• This advancement holds significant potential for micro-manufacturing and precision metrology.