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Generalized shift-rotation absolute measurement method for high-numerical-aperture spherical surfaces with global

Zhongming Yang, Jinyu Du, Chao Tian

|October 19, 2017

Summary

This summary is machine-generated.

A novel generalized shift-rotation method precisely measures high-numerical-aperture spherical surfaces. This technique minimizes aberrations and avoids errors common in other absolute measurement approaches.

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Area of Science:

Optical metrology
Surface characterization
Precision engineering

Background:

Accurate measurement of high-numerical-aperture (NA) spherical surfaces is critical in optics manufacturing.
Existing absolute measurement methods often suffer from high-order misalignment aberrations and translation/rotation errors.

Purpose of the Study:

To propose a generalized shift-rotation absolute measurement method for high-NA spherical surfaces.
To eliminate high-order misalignment aberrations during measurement.
To avoid translation and rotation errors inherent in other methods.

Main Methods:

Wavefront difference method for aberration removal.
A single rotational and a single translational measurement position are required.
Wavefront reconstruction using a self-adaptive differential evolution algorithm to determine surface shape, rotation, and translation parameters.

Main Results:

The generalized shift-rotation method successfully measures the absolute surface shape of high-NA spherical surfaces.
Experimental results demonstrate high precision, with a reference surface shape difference of 0.12 nm root mean square between two tests.
The method effectively removes high-order misalignment aberrations.

Conclusions:

The proposed generalized shift-rotation method offers a robust and accurate solution for absolute surface metrology of high-NA spherical optics.
This technique enhances precision and reliability in optical surface measurements.
The method overcomes limitations of previous absolute measurement techniques.